According to the customer's design drawing and processing, high-aspect ratio and high-precision micro-holes or micro-channels can be opened for customers to make bio-chips or micro-electromechanical (MEMS) and other micro-processing processes.
Suitable materials: glass, silicon wafer, acrylic, PMMA
Minimum line width: 10μm
Processing aperture: 10μm or more
Maximum aspect ratio: 1:10
Machining accuracy: aperture ±1μm
Position accuracy: within 5μm
Processing area: 150mm*150mm
Leading industry advantage
1. Cooperate to open micro-channels on various materials.
2. Apply to difficult processing with high aspect ratio.